Numerical Simulation of Thermal History for Czochralski Growth of Silicon Single Crystals.
نویسندگان
چکیده
منابع مشابه
Czochralski Growth of Oxide Crystals: Numerical Simulation and Experiments
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ژورنال
عنوان ژورنال: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B
سال: 1992
ISSN: 0387-5016,1884-8346
DOI: 10.1299/kikaib.58.3173